Celerity Introduces Next Generation GF100 Series Mass Flow Controllers for Semiconductor Device and Solar Cell Manufacturing
20/01/2009 08:03
PR Newswire
SAN JOSE, California, January 20 /PRNewswire/ --
- GF100 Series MFCs provide seamless RoHS compliant upgrade featuring
enhanced quality, reliability and reduced cost of ownership
Celerity, Inc., a technology leader in precision instruments and advanced
gas and liquid delivery solutions for the global semiconductor, solar and
electronics industries, announced today the introduction of its new GF100
series mass flow controller (MFC) designed to precisely measure, monitor and
control ultra high purity process gas chemistry in semiconductor device and
solar cell manufacturing processes. The new Celerity GF100 series MFC is a
highly configurable platform featuring Celerity's second generation
proprietary pressure transient insensitive flow technology, which improves
process control, reduces cost of ownership, and eliminates complexity of
inventory management.
The new Celerity GF100 series mass flow controller product family
features a number of key benefits including high accuracy, reproducible gas
measurement, control from advanced digital architecture, in situ electronic
reconfiguration of gas and flow range for maximum process flexibility and
optimization, pressure transient insensitive flow technology design (enables
significant cost and size reduction of high purity gas delivery systems), and
intelligent embedded diagnostics, service port and software for simple and
efficient on-tool maintenance.
"Celerity is a market leader in advanced digital ultra high purity mass
flow controllers and an industry pioneer in pressure transient insensitive
MFCs. By leveraging our extensive experience in gas flow control, the GF100
series is a continuous improvement update (CIP) of our market leading
precision mass flow controllers, providing customers with a seamless RoHS
compliant upgrade for enhanced process control and lower cost of ownership,"
said David Somo, Celerity's Senior Vice President of Sales and Marketing.
About Celerity
Celerity is a technology leader in the design, engineering, and
manufacturing of precision instruments and advanced gas and liquid delivery
solutions that are integral to the equipment used in manufacturing
semiconductors, flat panel displays, solar panels and related products.
Celerity, headquartered in San Jose, California, has approximately 800
employees worldwide, and is a privately held company with a majority
ownership by Texas Pacific Group. For additional information, please visit
http://www.celerity.net.
Industry Media Inquiries, David Somo, +1-408-935-4500, dsomo@celerity.net, or Financial Media and Investor Inquiries, Ron Lacey, +1-408-935-4500, rlacey@celerity.net, both of Celerity, Inc.
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